000124245 001__ 124245
000124245 005__ 20190228220231.0
000124245 037__ $$aCONF
000124245 245__ $$aChallenges in RF plasma disposition on square-meter substrates
000124245 269__ $$a2003
000124245 260__ $$c2003
000124245 336__ $$aConference Papers
000124245 500__ $$aInvited paper at the 14th Int. Colloquium on Plasma Processes, Juan-Les-Pins, Antibes, France, June/July 2003
000124245 700__ $$0240530$$g103532$$aSansonnens, L.
000124245 700__ $$aSchmitt, J.P.M.
000124245 700__ $$0241906$$g105426$$aHowling, A.A.
000124245 700__ $$0241418$$g131626$$aBallutaud, J.
000124245 700__ $$aSchmidt, H.$$g144320$$0241173
000124245 700__ $$aHollenstein, Ch.$$g105413$$0240129
000124245 909C0 $$pCRPP
000124245 909C0 $$0252028$$pSPC
000124245 909CO $$pconf$$pSB$$ooai:infoscience.tind.io:124245
000124245 909C0 $$xU12272$$xU12268$$xU10558$$xU10635$$xU12266$$xU10636$$xU10137$$xU12270$$xU10557$$xU12273$$xU10559$$xU12271$$xU12269$$xU12267$$xU10136
000124245 937__ $$aCRPP-CONF-2003-064
000124245 970__ $$a3619-CONF/CRPP
000124245 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000124245 980__ $$aCONF