Challenges in RF plasma disposition on square-meter substrates
2003
Details
Title
Challenges in RF plasma disposition on square-meter substrates
Author(s)
Sansonnens, L. ; Schmitt, J.P.M. ; Howling, A.A. ; Ballutaud, J. ; Schmidt, H. ; Hollenstein, Ch.
Conference
14th Int. Colloquium on Plasma Processes, Juan-Les-Pins, Antibes, France, June/July 2003
Date
2003
Note
Invited paper
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13