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conference paper not in proceedings
Challenges in RF plasma disposition on square-meter substrates
2003
Type
conference paper not in proceedings
Authors
•
Schmitt, J.P.M.
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•
•
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Publication date
2003
Note
Invited paper
Peer reviewed
REVIEWED
Event name | Event place | Event date |
Juan-Les-Pins, Antibes, France | June/July 2003 | |
Available on Infoscience
May 13, 2008
Use this identifier to reference this record