Infoscience

Conference paper

Challenges in RF plasma disposition on square-meter substrates

    Note:

    Invited paper at the 14th Int. Colloquium on Plasma Processes, Juan-Les-Pins, Antibes, France, June/July 2003

    Reference

    • CRPP-CONF-2003-064

    Record created on 2008-05-13, modified on 2016-08-08

Fulltext

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