Consequences of non-uniform RF plasma potential in large-area capacitive reactors
2003
Details
Title
Consequences of non-uniform RF plasma potential in large-area capacitive reactors
Author(s)
Ballutaud, J. ; Hollenstein, Ch. ; Howling, A.A. ; Sansonnens, L. ; Schmidt, H. ; Schmitt, J.P.M.
Conference
16th International Symposium on Plasma Chemistry
Date
2003
Note
16th International Symposium on Plasma Chemistry, Taormina, Italy, June 2003
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13