Infoscience

Conference paper

Mechanism of substrate charging after plasma processing

    Note:

    Proc. 15th International Symposium on Plasma Chemistry, Orléans, France, July 2001, Vol. I, 33-39 (2001)

    Reference

    • CRPP-CONF-2001-061

    Record created on 2008-05-13, modified on 2016-08-08

Fulltext

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