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000123986 245__ $$aRF plasma deposition uniformity on square-meter substrates
000123986 269__ $$a2000
000123986 260__ $$c2000
000123986 336__ $$aConference Papers
000123986 500__ $$aProc. 27th EPS Conference on Controlled Fusion and Plasma Physics, Budapest, Hungary, 12-16 June 2000, ECA Vol. 24B, 1268-1271 (2000) (P3-122)
000123986 700__ $$0240530$$g103532$$aSansonnens, L.
000123986 700__ $$0241906$$g105426$$aHowling, A.A.
000123986 700__ $$g131626$$aBallutaud, J.$$0241418
000123986 700__ $$aHollenstein, Ch.$$g105413$$0240129
000123986 7112_ $$a27th EPS Conference on Controlled Fusion and Plasma Physics
000123986 773__ $$j24B$$tProc. 27th EPS Conference on Controlled Fusion and Plasma Physics
000123986 909C0 $$pCRPP
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000123986 909CO $$pconf$$pSB$$ooai:infoscience.tind.io:123986
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000123986 937__ $$aCRPP-CONF-2000-074
000123986 970__ $$a3360-CONF/CRPP
000123986 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000123986 980__ $$aCONF