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000123986 005__ 20190228220226.0
000123986 037__ $$aCONF
000123986 245__ $$aRF plasma deposition uniformity on square-meter substrates
000123986 269__ $$a2000
000123986 260__ $$c2000
000123986 336__ $$aConference Papers
000123986 500__ $$aProc. 27th EPS Conference on Controlled Fusion and Plasma Physics, Budapest, Hungary, 12-16 June 2000, ECA Vol. 24B, 1268-1271 (2000) (P3-122)
000123986 700__ $$0240530$$aSansonnens, L.$$g103532
000123986 700__ $$0241906$$aHowling, A.A.$$g105426
000123986 700__ $$0241418$$aBallutaud, J.$$g131626
000123986 700__ $$0240129$$aHollenstein, Ch.$$g105413
000123986 7112_ $$a27th EPS Conference on Controlled Fusion and Plasma Physics
000123986 773__ $$j24B$$tProc. 27th EPS Conference on Controlled Fusion and Plasma Physics
000123986 909C0 $$pCRPP
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000123986 909CO $$ooai:infoscience.tind.io:123986$$pconf$$pSB
000123986 937__ $$aCRPP-CONF-2000-074
000123986 970__ $$a3360-CONF/CRPP
000123986 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000123986 980__ $$aCONF