000123961 001__ 123961
000123961 005__ 20190228220225.0
000123961 037__ $$aCONF
000123961 245__ $$aInsitu gas phase and particle diagnostics of hexamethyldisiloxane rf plasmas
000123961 269__ $$a2000
000123961 260__ $$c2000
000123961 336__ $$aConference Papers
000123961 500__ $$aSociété Suisse de Physique, Printemps 2000, Montreux,
000123961 700__ $$aMagni, D.
000123961 7112_ $$aSociété Suisse de Physique
000123961 909C0 $$pCRPP
000123961 909C0 $$0252028$$pSPC
000123961 909CO $$pconf$$pSB$$ooai:infoscience.tind.io:123961
000123961 909C0 $$xU12272$$xU12268$$xU10558$$xU10635$$xU12266$$xU10636$$xU10137$$xU12270$$xU10557$$xU12273$$xU10559$$xU12271$$xU12269$$xU12267$$xU10136
000123961 937__ $$aCRPP-CONF-2000-050
000123961 970__ $$a3335-CONF/CRPP
000123961 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000123961 980__ $$aCONF