Insitu gas phase and particle diagnostics of hexamethyldisiloxane rf plasmas


Presented at:
Société Suisse de Physique
Year:
2000
Note:
Société Suisse de Physique, Printemps 2000, Montreux,
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-09-13


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