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conference paper
On the powder formation in industrial reactive RF plasmas
1999
Proceedings of the 2nd Int. Conference on the Physics of Dusty Plasmas
Type
conference paper
Authors
Publication date
1999
Published in
Proceedings of the 2nd Int. Conference on the Physics of Dusty Plasmas
Note
Proceedings of the 2nd Int. Conference on the Physics of Dusty Plasmas, Hakone, Japan, May 1999, ICPDP-99, Edited: Y. Nakamura Elsevier p. 169
Peer reviewed
REVIEWED
Available on Infoscience
May 13, 2008
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