On the powder formation in industrial reactive RF plasmas


Published in:
Proceedings of the 2nd Int. Conference on the Physics of Dusty Plasmas
Presented at:
2nd Int. Conference on the Physics of Dusty Plasmas
Year:
1999
Note:
Proceedings of the 2nd Int. Conference on the Physics of Dusty Plasmas, Hakone, Japan, May 1999, ICPDP-99, Edited: Y. Nakamura Elsevier p. 169
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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