000123785 001__ 123785
000123785 005__ 20190228220222.0
000123785 037__ $$aCONF
000123785 245__ $$aGas phase and particle diagnostics of HMDSO plasmas by infrared absorption spectroscopy
000123785 269__ $$a1998
000123785 260__ $$c1998
000123785 336__ $$aConference Papers
000123785 500__ $$aMRS Symposium, Proceeding Y: Plasma deposition and Treatment of Polymers, Fall Meeting, 1998, Boston, USA
000123785 700__ $$aMagni, D.
000123785 700__ $$aDeschenaux, Ch.
000123785 700__ $$aCourteille, C.
000123785 700__ $$0241906$$g105426$$aHowling, A.A.
000123785 700__ $$g105413$$aHollenstein, Ch.$$0240129
000123785 700__ $$aFayet, P.
000123785 7112_ $$aMRS Symposium
000123785 909C0 $$pCRPP
000123785 909C0 $$0252028$$pSPC
000123785 909CO $$pconf$$pSB$$ooai:infoscience.tind.io:123785
000123785 909C0 $$xU12272$$xU12268$$xU10558$$xU10635$$xU12266$$xU10636$$xU10137$$xU12270$$xU10557$$xU12273$$xU10559$$xU12271$$xU12269$$xU12267$$xU10136
000123785 937__ $$aCRPP-CONF-1998-039
000123785 970__ $$a3159-CONF/CRPP
000123785 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000123785 980__ $$aCONF