Gas phase and particle diagnostics of HMDSO plasmas by infrared absorption spectroscopy


Presented at:
MRS Symposium
Year:
1998
Note:
MRS Symposium, Proceeding Y: Plasma deposition and Treatment of Polymers, Fall Meeting, 1998, Boston, USA
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-09-13


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