000123756 001__ 123756
000123756 005__ 20190228220221.0
000123756 037__ $$aCONF
000123756 245__ $$aGas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy
000123756 269__ $$a1998
000123756 260__ $$c1998
000123756 336__ $$aConference Papers
000123756 500__ $$aProc. 41st Society of Vacuum Coaters Annual Technical Conference, Boston, USA, 18-23 April 1998, 327 - 332 (1998)
000123756 700__ $$aCourteille, C.
000123756 700__ $$aMagni, D.
000123756 700__ $$aDeschenaux, Ch.
000123756 700__ $$aFayet, P.
000123756 700__ $$0241906$$g105426$$aHowling, A.A.
000123756 700__ $$aHollenstein, Ch.$$g105413$$0240129
000123756 7112_ $$a41st Society of Vacuum Coaters Annual Technical Conference
000123756 773__ $$tProc. 41st Society of Vacuum Coaters Annual Technical Conference
000123756 909C0 $$pCRPP
000123756 909C0 $$0252028$$pSPC
000123756 909CO $$pconf$$pSB$$ooai:infoscience.tind.io:123756
000123756 909C0 $$xU12272$$xU12268$$xU10558$$xU10635$$xU12266$$xU10636$$xU10137$$xU12270$$xU10557$$xU12273$$xU10559$$xU12271$$xU12269$$xU12267$$xU10136
000123756 937__ $$aCRPP-CONF-1998-011
000123756 970__ $$a3130-CONF/CRPP
000123756 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000123756 980__ $$aCONF