Gas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy
1998
Details
Title
Gas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy
Author(s)
Courteille, C. ; Magni, D. ; Deschenaux, Ch. ; Fayet, P. ; Howling, A.A. ; Hollenstein, Ch.
Published in
Proc. 41st Society of Vacuum Coaters Annual Technical Conference
Conference
41st Society of Vacuum Coaters Annual Technical Conference
Date
1998
Note
Proc. 41st Society of Vacuum Coaters Annual Technical Conference, Boston, USA, 18-23 April 1998, 327 - 332 (1998)
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13