Infoscience

Conference paper

Gas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy

    Note:

    Proc. 41st Society of Vacuum Coaters Annual Technical Conference, Boston, USA, 18-23 April 1998, 327 - 332 (1998)

    Reference

    • CRPP-CONF-1998-011

    Record created on 2008-05-13, modified on 2016-08-08

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