Gas phase and particle diagnostic of HMDSO plasmas by infrared absorption spectroscopy


Published in:
Proc. 41st Society of Vacuum Coaters Annual Technical Conference
Presented at:
41st Society of Vacuum Coaters Annual Technical Conference
Year:
1998
Note:
Proc. 41st Society of Vacuum Coaters Annual Technical Conference, Boston, USA, 18-23 April 1998, 327 - 332 (1998)
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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