Nanometer-scale silicon powders in RF silane plasmas
1997
Details
Title
Nanometer-scale silicon powders in RF silane plasmas
Author(s)
Hollenstein, Ch. ; Kroesen, G. ; Dorier, J.-L. ; Courteille, C. ; Sansonnens, L. ; Schwarzenbach, W. ; Magni, D. ; Howling, A.A.
Published in
Proc. 3rd Int. Conference on Reactive Plasmas
Conference
3rd Int. Conference on Reactive Plasmas
Date
1997
Note
Proc. 3rd Int. Conference on Reactive Plasmas, Nara, Japan, January 1997, p. 227 (1997)
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13