Nanometer-scale silicon powders in RF silane plasmas


Published in:
Proc. 3rd Int. Conference on Reactive Plasmas
Presented at:
3rd Int. Conference on Reactive Plasmas
Year:
1997
Note:
Proc. 3rd Int. Conference on Reactive Plasmas, Nara, Japan, January 1997, p. 227 (1997)
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-09-13


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