Mask-edge distributions produced by 80 keV As+ ion implantation into Si
1997
Details
Title
Mask-edge distributions produced by 80 keV As+ ion implantation into Si
Author(s)
Danailov, D. ; Karpuzov, D. ; AlMazouzi, A. ; deAlmeida, P. ; Victoria, M.
Published in
MRS Proceedings
Volume
439
Pages
119
Conference
MRS Symposium on Microstructure evolution during irradiation
Date
1997
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13