Infrared absorption spectroscopy of SiO2 deposition plasmas
1997
Details
Title
Infrared absorption spectroscopy of SiO2 deposition plasmas
Author(s)
Courteille, C. ; Magni, D. ; Howling, A.A. ; Nosenko, V. ; Hollenstein, Ch. ; Fayet, P.
Published in
Proc. of the Soc. of Vacuum Coaters
Conference
the Soc. of Vacuum Coaters
Date
1997
Note
Proc. of the Soc. of Vacuum Coaters, 40th Annual Technical Conference, April 1997
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13