Details
Title
Frequency effects in silane plasmas for PECVD
Author(s)
Howling, A.A. ; Dorier, J.-L. ; Hollenstein, Ch.
Published in
Proc. 38th Annual AVS Symposium & Topical Conference
Conference
38th Annual AVS Symposium & Topical Conference
Date
1992
Note
Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1080 (1992)
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13