Properties VHF plasmas related to technological aspects of a-Si:H deposition
1992
Details
Title
Properties VHF plasmas related to technological aspects of a-Si:H deposition
Author(s)
Hollenstein, Ch. ; Howling, A.A. ; Dorier, J.-L.
Published in
Proc. 11th Europ. Photovoltaic Solar Energy Conference
Conference
11th Europ. Photovoltaic Solar Energy Conference
Date
1992
Note
Proc. 11th Europ. Photovoltaic Solar Energy Conference, Montreux, Oct. 1992
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13