Powder dynamics in VHF silane plasmas


Published in:
Proc. 38th Annual AVS Symposium & Topical Conference
Presented at:
38th Annual AVS Symposium & Topical Conference
Year:
1992
Note:
Proc. 38th Annual AVS Symposium & Topical Conference, Seattle, USA, November 1991, J. Vac. Sci. Technol. A 10, 1048 (1992)
Laboratories:
SPC
CRPP




 Record created 2008-05-13, last modified 2018-01-28


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