Diagnostics of very high frequency silane plasmas
1991
Details
Title
Diagnostics of very high frequency silane plasmas
Author(s)
Howling, A.A. ; Hollenstein, Ch. ; Dorier, J.-L. ; Paris, P.J. ; Favre, M.
Published in
Proc. 10th European Photovoltaic Solar Energy Conference
Conference
10th European Photovoltaic Solar Energy Conference
Date
1991
Note
Proc. 10th European Photovoltaic Solar Energy Conference, Lisbon, Portugal, 169, April 1991
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2008-05-13