000121506 001__ 121506
000121506 005__ 20190316234245.0
000121506 0247_ $$2doi$$a10.1016/j.sna.2007.12.030
000121506 02470 $$2ISI$$a000272318900015
000121506 037__ $$aARTICLE
000121506 245__ $$aMechanical characterization of a dielectric elastomer microactuator with ion-implanted electrodes
000121506 269__ $$a2008
000121506 260__ $$c2008
000121506 336__ $$aJournal Articles
000121506 520__ $$aWe report on the mechanical characterization and modeling of a non-prestretched dielectric elastomer diaphragm microactuator with ion-implanted electrodes under the influence of a distributed load (pressure). Thin polydimethysiloxane (PDMS) membranes (30 um thick, 2–3 mm diameter) were implanted on both side with gold ions by Filtered Cathodic Vacuum Arc (FCVA) and bonded on silicon chips with through-holes. A voltage applied between the implanted electrodes creates a compressive stress in the dielectric and causes the membrane to buckle and form a bump whose height depends on the mechanical properties of the electroactive compound, the voltage and the force applied on the membrane. Maximum unloaded displacements up to 7% of the membrane’s lateral dimensions were achieved, which was reduced to 3% when a distributed force of 1 kPa was applied on the membrane. The maximum mechanical work obtained by the actuators is in the range of 0.3uJ. An analytical model was developed to calculate the displacement of the Dielectric Elastomer Actuators (DEAs) based on their mechanical and geometrical properties, voltage and applied force. The model shows very good agreement with the measurements and allows accurate performance prediction and dimensioning of such actuators.
000121506 6531_ $$aDielectric electroactive polymer actuators
000121506 6531_ $$aIon implantation
000121506 6531_ $$aElectrostatic actuation
000121506 6531_ $$aMembrane
000121506 6531_ $$aArtificial muscles
000121506 6531_ $$aDEAP
000121506 700__ $$0241188$$g127048$$aRosset, Samuel
000121506 700__ $$0242917$$g137877$$aNiklaus, Muhamed
000121506 700__ $$g168661$$aDubois, Philippe$$0240308
000121506 700__ $$aShea, Herbert R.$$g162368$$0240376
000121506 773__ $$j144$$tSensors and Actuators A: Physical$$k1$$q185-193
000121506 8564_ $$uhttps://infoscience.epfl.ch/record/121506/files/Post_print.pdf$$zn/a$$s784347
000121506 8564_ $$uhttps://infoscience.epfl.ch/record/121506/files/Rosset_S%26A_2008.pdf$$zn/a$$s1576428
000121506 909C0 $$xU10955$$0252107$$pLMTS
000121506 909CO $$ooai:infoscience.tind.io:121506$$qGLOBAL_SET$$pSTI$$particle
000121506 917Z8 $$x162368
000121506 937__ $$aLMTS-ARTICLE-2008-002
000121506 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000121506 980__ $$aARTICLE