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Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect
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Probe measurements of plasma potential nonuniformi[...]
-
Howling, A.A.
et al
main
file(s):
lrp_801_05
version 1
lrp_801_05.pdf
[2.43 MB]
27 Jan 2018, 13:18
n/a