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Non-uniform rf plasma potential due to edge asymmetry in large-area rf reactors
Howling, A.A.
;
Sansonnens, L.
;
Ballutaud, J.
;
Hollenstein, Ch.
;
Schmitt, J.P.M.
2004
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Title
Non-uniform rf plasma potential due to edge asymmetry in large-area rf reactors
Author(s)
Howling, A.A.
;
Sansonnens, L.
;
Ballutaud, J.
;
Hollenstein, Ch.
;
Schmitt, J.P.M.
Date
2004
Keywords
LRP 788
Laboratories
CRPP
SPC
Record Appears in
Scientific production and competences
>
SB - School of Basic Sciences
>
SPC - Swiss Plasma Center
>
SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18
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lrp_788_04_hq - n/a