Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry
2000
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Details
Title
Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry
Author(s)
Magni, D. ; Deschenaux, Ch. ; Hollenstein, Ch. ; Creatore, A. ; Fayet, P.
Date
2000
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18