High growth rate deposition of hydrogenated microcrystalline Silicon by a high current DC discharge
1999
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Details
Title
High growth rate deposition of hydrogenated microcrystalline Silicon by a high current DC discharge
Author(s)
Franz, D. ; Grangeon, F. ; Delachaux, T ; Howling, A.A. ; Hollenstein, Ch.
Date
1999
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18