Silicon oxide particle formation in RF plasmas investigated by Infrared absorption spectroscopy and mass spectrometry
1997
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Title
Silicon oxide particle formation in RF plasmas investigated by Infrared absorption spectroscopy and mass spectrometry
Author(s)
Hollenstein, Ch. ; Howling, A.A. ; Courteille, C. ; Magni, D. ; Scholtz Odermatt, S. ; Kroesen, G.M.W. ; Simons, N. ; de Zeeuw, W. ; Schwarzenbach, W.
Date
1997
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18