Voltage uniformity study in large-area reactors for RF plasma deposition
1996
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Details
Title
Voltage uniformity study in large-area reactors for RF plasma deposition
Author(s)
Sansonnens, L. ; Pletzer, A. ; Magni, D. ; Howling, A.A. ; Hollenstein, Ch. ; Schmitt, J.P.M.
Date
1996
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18