From molecules to particles in Silane plasmas
1995
Files
Details
Title
From molecules to particles in Silane plasmas
Author(s)
Howling, A.A. ; Courteille, C. ; Dorier, J.-L. ; Sansonnens, L. ; Hollenstein, Ch.
Date
1995
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18