Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering
1995
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Details
Title
Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering
Author(s)
Dorier, J.-L. ; Hollenstein, Ch. ; Howling, A.A. ; Courteille, C. ; Schwarzenbach, W. ; Merad, A. ; Boeuf, J.-P.
Date
1995
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18