Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering
Dorier, J.-L.; Hollenstein, Ch.; Howling, A.A.; Courteille, C.; Schwarzenbach, W.; Merad, A.; Boeuf, J.-P.
1995

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Title Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering
Author(s) Dorier, J.-L. ; Hollenstein, Ch. ; Howling, A.A. ; Courteille, C. ; Schwarzenbach, W. ; Merad, A. ; Boeuf, J.-P.
Date 1995
Keywords
Laboratories CRPP
SPC
Record Appears in Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
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