Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering - Infoscience

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Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering

Dorier, J.-L. ; Hollenstein, Ch. ; Howling, A.A. ; Courteille, C.[...]

Year:

1995

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Laboratories:

SPC
CRPP

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Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Publicly available
Work produced at EPFL
Technical Reports
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Record created 2008-04-18, last modified 2018-01-28

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