Infoscience

Report

Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering

Dorier, J.-L.; Hollenstein, Ch.; Howling, A.A.; Courteille, C.; Schwarzenbach, W.; Merad, A.; Boeuf, J.-P.
  • Publication date: 1995

    Keywords: LRP 522

    Reference

    • CRPP-REPORT-1995-009

    Record created on 2008-04-18, modified on 2017-05-12

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