Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering
1995
Files
Details
Title
Visualization of powder trapping in RF silane plasmas by 2-D polarization-sensitive laser scattering
Author(s)
Dorier, J.-L. ; Hollenstein, Ch. ; Howling, A.A. ; Courteille, C. ; Schwarzenbach, W. ; Merad, A. ; Boeuf, J.-P.
Date
1995
Keywords
Laboratories
CRPP
SPC
SPC