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Spatio-temporal powder formation and trapping in RF Silane plasmas using 2-D polarization-sensitive laser scattering
Dorier, J.-L.
;
Hollenstein, Ch.
;
Howling, A.A.
1994
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Title
Spatio-temporal powder formation and trapping in RF Silane plasmas using 2-D polarization-sensitive laser scattering
Author(s)
Dorier, J.-L.
;
Hollenstein, Ch.
;
Howling, A.A.
Date
1994
Keywords
LRP 506
Laboratories
CRPP
SPC
Record Appears in
Scientific production and competences
>
SB - School of Basic Sciences
>
SPC - Swiss Plasma Center
>
SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18
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lrp_506_94_hq - n/a