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Time-resolved measurements of highly-polymerised negative ions in RF silane plasma deposition experiments
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Time-resolved measurements of highly-polymerised n[...]
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Howling, A.A.
et al
main
file(s):
lrp_479_93_hq
version 1
lrp_479_93_hq.pdf
[2.21 MB]
27 Jan 2018, 13:07
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