Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering
1993
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Details
Title
Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering
Author(s)
Hollenstein, Ch. ; Dorier, J.-L. ; Dutta, J. ; Howling, A.A.
Date
1993
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18