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000121000 245__ $$aNegative ion mass spectra and particulate formation in RF silane plasma deposition experiments
000121000 269__ $$a1992
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000121000 336__ $$aReports
000121000 6531_ $$aLRP 461
000121000 700__ $$0241906$$g105426$$aHowling, A.A.
000121000 700__ $$0240717$$g101170$$aDorier, J.-L.
000121000 700__ $$aHollenstein, Ch.$$g105413$$0240129
000121000 8564_ $$uhttps://infoscience.epfl.ch/record/121000/files/lrp_461_92_hq.pdf$$zn/a$$s574425
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000121000 937__ $$aCRPP-REPORT-1992-010
000121000 973__ $$sPUBLISHED$$aEPFL
000121000 980__ $$aREPORT