000121000 001__ 121000
000121000 005__ 20180913054346.0
000121000 037__ $$aREP_WORK
000121000 245__ $$aNegative ion mass spectra and particulate formation in RF silane plasma deposition experiments
000121000 269__ $$a1992
000121000 260__ $$c1992
000121000 336__ $$aReports
000121000 6531_ $$aLRP 461
000121000 700__ $$0241906$$aHowling, A.A.$$g105426
000121000 700__ $$0240717$$aDorier, J.-L.$$g101170
000121000 700__ $$0240129$$aHollenstein, Ch.$$g105413
000121000 8564_ $$s574425$$uhttps://infoscience.epfl.ch/record/121000/files/lrp_461_92_hq.pdf$$zn/a
000121000 909C0 $$pCRPP
000121000 909C0 $$0252028$$pSPC
000121000 909CO $$ooai:infoscience.tind.io:121000$$pSB$$preport
000121000 937__ $$aCRPP-REPORT-1992-010
000121000 973__ $$aEPFL$$sPUBLISHED
000121000 980__ $$aREPORT