Frequency effects in Silane plasmas for PECVD
1991
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Details
Title
Frequency effects in Silane plasmas for PECVD
Author(s)
Howling, A.A. ; Dorier, J.-L. ; Hollenstein, Ch. ; Kroll, U. ; Finger, F.
Date
1991
Keywords
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2008-04-18