From molecules to particles in silane plasmas

Particle formation has been investigated experimentally from the initial molecular precursors up to the final micron-sized particles in a low pressure silane rf capacitive discharge. Neutrals and ions were studied by quadrupole mass spectrometry in power-modulated plasmas: Whole series of negative ions were observed, ranging from monosilicon anions through to nanometric clusters. Anion confinement results in particles and conversely, anion de-trapping can inhibit particle formation. Plasma polymerisation is considered in terms of neutral and ionic species. Laser light scattering measurements show that particles appear during a rapid coalescence phase and possible mechanisms are discussed.


Published in:
Pure and Applied Chemistry, 68, 5, 1017-1022
Year:
1996
ISSN:
0033-4545
Laboratories:
SPC
CRPP




 Record created 2008-04-16, last modified 2018-01-28


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