Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scattering
1995
Details
Title
Spatiotemporal powder formation and trapping in radio frequency silane plasmas using two-dimensional polarization-sensitive laser scattering
Author(s)
Dorier, J. L. ; Hollenstein, C. ; Howling, A. A.
Published in
Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films
Volume
13
Issue
3
Pages
918-926
Date
1995
Publisher
American Vacuum Society
ISSN
0734-2101
Note
41st National Symposium of the American-Vacuum-Society OCT 24-28, 1994, DENVER, CO; 1; Part 1
Other identifier(s)
View record in Web of Science
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-04-16