Diagnostics of particle genesis and growth in RF Silane plasmas by ion mass spectrometry and light scattering
1994
Details
Title
Diagnostics of particle genesis and growth in RF Silane plasmas by ion mass spectrometry and light scattering
Author(s)
Hollenstein, Ch. ; Dorier, J.-L. ; Dutta, J. ; Sansonnens, L. ; Howling, A.A.
Published in
Plasma Sources Science and Technology
Volume
3
Pages
278-285
Date
1994
Laboratories
CRPP
SPC
SPC
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > SPC - Swiss Plasma Center > SPC - Swiss Plasma Center
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-04-16