Taking piezoelectric microsystems from the laboratory to production
2007
Details
Title
Taking piezoelectric microsystems from the laboratory to production
Author(s)
Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
Published in
Journal of Electroceramics
Volume
19
Issue
4
Pages
357-362
Date
2007
Other identifier(s)
DAR: 11737
View record in Web of Science
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-04-11