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research article
Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals
Use this identifier to reference this record
Type
research article
Web of Science ID
WOS:000251795200028
Authors
Publication date
2007
Published in
Volume
19
Issue
4
Start page
407
End page
411
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
April 11, 2008