A highly sensitive Pb(Zr,Ti)O-3 thin film ultrasonic micro-sensor with a grooved diaphragm
2007
Details
Title
A highly sensitive Pb(Zr,Ti)O-3 thin film ultrasonic micro-sensor with a grooved diaphragm
Author(s)
Matsushima, T. ; Xiong, S. ; Kawada, H. ; Yamanaka, H. ; Muralt, P.
Published in
IEEE Transactions on Ultrasonics Ferroelectrics And Frequency Control
Volume
54
Issue
12
Pages
2439-2445
Date
2007
Other identifier(s)
DAR: 11980
View record in Web of Science
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-04-11