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Novel 3D PZT thin film structure for micromechanics
Calame, F.
;
Muralt, P.
2007
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Title
Novel 3D PZT thin film structure for micromechanics
Author(s)
Calame, F.
;
Muralt, P.
Published in
Journal Of Electroceramics
Volume
19
Issue
4
Pages
399-402
Date
2007
Publisher
Springer US
ISSN
1385-3449
Note
National Licences
DOI
https://doi.org/10.1007/s10832-007-9054-1
Other identifier(s)
DAR: 11739
View record in Web of Science
Laboratories
LC
Record Appears in
Scientific production and competences
>
STI - School of Engineering
>
STI Archives
>
LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2008-04-11
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10832_2007_Article_9054