Conference paper

Low-power hermetically sealed on-chip plasma light source micromachined in glass

We report on the fabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity in which electrodes are used to ignite a low power (≪500 mW) RF plasma.


    • LMTS-CONF-2008-001

    Record created on 2008-02-13, modified on 2017-05-10

Related material