Inkjet printing of SU-8 for polymer-based MEMS: A case study for microlenses
2008
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Details
Title
Inkjet printing of SU-8 for polymer-based MEMS: A case study for microlenses
Author(s)
Fakhfouri, V. ; Cantale, N. ; Mermoud, G. ; Kim, J. Y. ; Boiko, D. ; Charbon, E. ; Martinoli, A. ; Brugger, J.
Conference
21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, USA, 13-17 January, 2008
Date
2008
Additional link
URL
Laboratories
LMIS1
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Work produced at EPFL
Published
Posters
Work produced at EPFL
Published
Posters
Record creation date
2008-01-31