Inkjet printing of SU-8 for polymer-based MEMS: A case study for microlenses


Presented at:
21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, USA, 13-17 January, 2008
Year:
2008
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2008-01-31, last modified 2018-03-17

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