000115334 001__ 115334
000115334 005__ 20181203021039.0
000115334 0247_ $$2doi$$a10.1016/j.mee.2007.12.013
000115334 02470 $$2ISI$$a000257413400092
000115334 037__ $$aARTICLE
000115334 245__ $$aMiniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator
000115334 269__ $$a2008
000115334 260__ $$c2008
000115334 336__ $$aJournal Articles
000115334 520__ $$aWe have fabricated and characterized a reciprocating poly(methylmetacrylate) (PMMA) ball-valve micropump actuated with a miniaturized cylindrical electromagnetic circuit. By finite element calculations, we have optimized the structure of the electromagnet that actuates a rare-earth permanent magnet embedded in a poly(dimethylsiloxane) (PDMS) pumping membrane. Powder blasting and conventional micromachining techniques are used for micropatterning the PMMA layers forming the microfluidic circuit. The self-priming ball-valve micropump exhibits a backpressure up to 35 kPa; water is pumped at a flow rate as high as 6.0 mL/min for a 2 W electromagnetic actuation power at the resonant frequency of 20 Hz. The actuation frequency-dependent flow rate is in excellent agreement with a damped oscillator model.
000115334 6531_ $$aMicropump
000115334 6531_ $$aElectromagnetic actuator
000115334 6531_ $$aBall-valve
000115334 6531_ $$aFEM
000115334 6531_ $$aPMMA
000115334 700__ $$0242802$$g172983$$aShen, Meng
000115334 700__ $$0241365$$g104278$$aYamahata, Christophe
000115334 700__ $$aGijs, Martin A. M.$$g113762$$0242801
000115334 773__ $$j85$$tMicroelectronic Engineering$$k5-6$$q1104-1107
000115334 909C0 $$xU10322$$0252094$$pLMIS2
000115334 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:115334
000115334 917Z8 $$x104278
000115334 917Z8 $$x104278
000115334 937__ $$aLMIS2-ARTICLE-2008-013
000115334 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000115334 980__ $$aARTICLE